Highest Resolution Electrical Measurements
Posted on October 15, 2021
Another Breakthrough by PrimeNano
ScanWave Pro Solutions™
Automated Quantification of Doping Levels at the Nanoscale
Santa Clara, California – October 15, 2021 – PrimeNano proudly announces the launch of ScanWave Pro Solutions™, a first ever automated product to perform quantified electrical measurements using an AFM. In this suite of solutions, the first material property to be quantified is the dopant concentration in semiconductors. The ScanWave Pro Solutions™ product is a combination of hardware and software. It uses ScanWave Pro™ as a platform and is initially released on Bruker Icon AFMs.
We have successfully field tested this new offering with the world’s top analytical service laboratories and are excited about the ease of use and quality of the results. ScanWave Pro Solutions™ now provides exceptional value to our customers and will help them solve challenging problems with ease in a fast and non-invasive way.
“ScanWave Pro™ released in late 2019 has become the industry standard for electrical AFM measurements with two orders of magnitude better performance over competing methodologies. We have had many requests from our Semiconductor customers to extend ScanWave Pro™ and provide an automated, user-friendly, calibrated, and quantified solution for electrical measurements. We are proud to release the first member of our ScanWave Pro Solutions™ family today, addressing this need.” said Eduard Weichselbaumer, PrimeNano’s CEO.
SCANWAVE PRO SOLUTIONSTM
Using an automated process, the result of imaging a sample is a color thermal map of dopant levels as shown to the right. The polarity of the dopant is also determined and included in the quantified image. The user can hover the mouse over a pixel and the value of the dopant concentration and polarity is immediately displayed. The quantified images are of nanoscale resolution so even the most advanced systems can be measured.
The unmatched sensitivity of ScanWave Pro™ covers the entire spectrum of dopant levels used in silicon chip production with ample headroom. This in turn enables analysis and process control for most devices in production today. ScanWave Pro Solutions™ takes full advantage of these capabilities.
You can see our technical presentation on ScanWave Pro Solutions™ at ISTFA 2021 in Phoenix in November 2021.
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