Highest Resolution Electrical Measurements

Backside Polished FPGA – Imaging Stored Charge on a Flash RAM Array

sMIM-R data revealing stored charge in a FLASH memory array imaged from the backside after polishing the Si to an approximate 100nm thickness. The data were acquired using an Oxford Instruments Asylum Research Cypher AFM in non-contact mode utilizing a 2nd internal lock-in amplifier synced to the same frequency as the mechanical resonance of the cantilever. The result is a dC/dZ image sensitive to the presence of strored charge in a single cell. The red color cells show where the charge is present.