Highest Resolution Electrical Measurements

IMEC p-Type Doped Staircase

Image is sMIM-C data from a p-type IMEC stair case with doping concentration from 10^15 to 10^21 atoms/cm^3. The image shows the monotonic sMIM-C response to the different doping concentrations of the steps. Image courtesy of A. Tselev, Oakridge National Labs.