Highest Resolution Electrical Measurements

PrimeNano at IPFA 2018

Posted on Jun 13, 2018 by Amster

PrimeNano will be presenting at this year's International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA). IPFA 2018 will be hosted in the Sands Hotel in Singapore. Our Senior Director Worldwide Marketing, Oskar Amster, will be giving a talk on the last day of the event, Thursday afternoon July 19 (Day 3) at 3:15PM.  The topic of the talk is Nano C-V imaging of Semiconductor Devices with Scanning Microwave Impedance Microscopy - Paper ID: 301 (9B.4).

Abstract

Two doped semiconductor samples are measured using probe-based Scanning Microwave Impedance Microscopy (sMIM) one plan-view polished CMOS image sensor and a cross-section polished power device. Both samples are imaged with sMIM using two different approaches: the first using a dual pass method, the first pass in contact mode the second pass at a fixed offset from the surface, simultaneous dC/dV images are acquired; the second method uses a non-resonant mode where C-V are acquired at specific lateral locations. The C-V curves are used to determine polarity compared to dC/dV and also to distinguish p-n junctions, characterize doping concentration, and build images at constant DC values to discern subtle changes not evident in traditional SCM imaging.

Come meet us and talk with the PrimeNano team regarding your own measurement requirements. To schedule an appointment, contact us.