A game changer, the ScanWaveTM Pro offers dramatically improved sensitivity and usability that has leapfrogged all other AFM based electrical systems available in the market today.
Key specs are highlighted below:
Capacitance sensitivity of < 0.075 attoFarad
Spatial resolution of ~ 1 nm
Dopant concentration sensitivity from intrinsic silicon to E20 a/cm3
Surface and sub-surface imaging
Tooless holder mount
No backside contact needed
High power output
>10X performance improvement over the ScanWave™ 1.5 (previous generation)
