Development of fully automated FAB Metrology Solution funded by SBIR CHIPS act
Santa Clara, California – October 2, 2024 – PrimeNano is pleased to announce that it has been awarded a “SBIR CHIPS for America” grant to develop a ScanWave™-based metrology solution.
PrimeNano is the market leader in electrical measurements on the nanoscale for scientific Atomic Force Microscopy (AFM) platforms, with its ScanWave Pro product family.
“ScanWave Pro™ has established itself as the industry standard for electrical AFM measurements, offering two orders of magnitude superior performance compared to alternative methodologies. By integrating this technology into fully automated and integrated FAB AFM platforms, we will significantly advance direct measurements of electrical properties for advanced process nodes.” said Eduard Weichselbaumer, PrimeNano’s CEO.
PrimeNano’s new metrology solution will leverage existing, proven, fully automated FAB AFM platforms. The SBIR CHIPS act grant will accelerate PrimeNano’s development and product release.
On September 24th, PrimeNano met with the CHIPS team, members of the House and Senate, and their staffers in Washington, D.C., to present the project and explain its potential impact.